EPI Process EPI TECH  |  EPI Process  |  EPI Products  |  EPI Facilities

        In Simgui, we use the Trichlorosilane (3N7)& Dichlorosilane(2N7) as the main silicon sources. The dopants are mainly three types: Diborane (50PPM4NB2H6/6NH2), Phosphine(50/100PPM5NPH3/6NH2) and Arsine according to customer's requirements. All special gases, the Hcl-5N,Hydrogen-6N5 are from the leading suppliers in the world.


Epi Process

 Quality of reactors

 Epitaxy on Different Substrates


Top ↑
Simgui gains the strength from its US-based parter, More Technologies,the acknowledged specialist in epitaxial technology. Simgui is benefiting from close collaboration with such leading substrate suppliers at home and abroad as Forrotec, Gritek and etc. Combing the effective, stable supply channels and its powerful, flexible processing ablility, Simgui has distinguished itself among its domestic and oversea competitors.
Address: 200 Xinlai Road, Jiading District Shanghai 201815, PRC Tel: +86-21-6952 2599 Fax: +86-21-6952 2221